Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7597531 | Method of controlling mover device | Keiji Okada, Michiro Sugitani, Junichi Murakami, Fumiaki Sato, Mitsukuni Tsukihara +2 more | 2009-10-06 |
| 7187143 | Mover device and semiconductor manufacturing apparatus and method | Keiji Okada, Michiro Sugitani, Junichi Murakami, Fumiaki Sato, Mitsukuni Tsukihara +2 more | 2007-03-06 |
| 6573517 | Ion implantation apparatus | Michiro Sugitani, Mitsukuni Tsukihara, Mitsuaki Kabasawa, Kouji Inada | 2003-06-03 |