Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107659 | Ion generator and ion implanter | — | 2021-08-31 |
| 9312163 | Impurity-doped layer formation apparatus and electrostatic chuck protection method | Masaru Tanaka, Masashi Kuriyama | 2016-04-12 |
| 6797968 | Ion beam processing method and apparatus therefor | Mitsukuni Tsukihara, Yoshitaka Amano, Mitsuaki Kabasawa, Michiro Sugitani, Hiroshi Matsushita | 2004-09-28 |
| 6794661 | Ion implantation apparatus capable of increasing beam current | Mitsukuni Tsukihara, Mitsuaki Kabasawa, Michiro Sugitani, Hiroshi Matsushita | 2004-09-21 |