Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9942827 | Dynamic crossband link method and wireless extender | Yi-Wen Liu | 2018-04-10 |
| 9869934 | Collector in an extreme ultraviolet lithography system with optimal air curtain protection | Tsung-Yu Chen, Chia-Hao Hsu, Shinn-Sheng Yu, Chia-Chen Chen | 2018-01-16 |
| 9735065 | Systems and methods of local focus error compensation for semiconductor processes | Chia-Hao Hsu, Pei-Cheng Hsu, Chih-Ming Chen, Chia-Chen Chen | 2017-08-15 |
| 9618856 | Method of overlay in extreme ultra-violet (EUV) lithography | Chia-Hao Hsu, Chia-Chen Chen | 2017-04-11 |
| 9558944 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Jui-Ching Wu, Shang-Chieh Chien, Chia-Jen Chen | 2017-01-31 |
| 9548209 | Method for integrated circuit fabrication | Ching-Fang Yu, Ting-Hao Hsu | 2017-01-17 |
| 9476764 | Wavefront adjustment in extreme ultra-violet (EUV) lithography | Chia-Hao Hsu, Tzu-Hsiang Chen, Chia-Chen Chen | 2016-10-25 |
| 9405204 | Method of overlay in extreme ultra-violet (EUV) lithography | Chia-Hao Hsu, Chia-Chen Chen | 2016-08-02 |
| 9377693 | Collector in an extreme ultraviolet lithography system with optimal air curtain protection | Tsung-Yu Chen, Chia-Hao Hsu, Shinn-Sheng Yu, Chia-Chen Chen | 2016-06-28 |
| 9214373 | Chuck exhaust openings | Chia-Hao Hsu, Kipling Yeh | 2015-12-15 |
| 9046776 | System, method and reticle for improved pattern quality in extreme ultraviolet (EUV) lithography and method for forming the reticle | Chia-Hao Hsu, Chia-Chen Chen, Jui-Ching Wu, Shang-Chieh Chien, Chia-Jen Chen | 2015-06-02 |
| 9034665 | Tool configuration and method for extreme ultra-violet (EUV) patterning with a deformable reflective surface | Tzu-Hsiang Chen, Chia-Hao Hsu, Chia-Chen Chen | 2015-05-19 |
| 9003337 | Systems and methods of local focus error compensation for semiconductor processes | Chia-Hao Hsu, Pei-Cheng Hsu, Chih-Ming Chen, Chia-Chen Chen | 2015-04-07 |
| 8980108 | Method for integrated circuit fabrication | Ching-Fang Yu, Ting-Hao Hsu | 2015-03-17 |
| 8052004 | Releasable lockable lid | Benjamin Cheng | 2011-11-08 |
| D643040 | Electrical card | Stephen Sedio, Shun-Jung Chuang | 2011-08-09 |