Issued Patents All Time
Showing 51–75 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6326219 | Methods for determining wavelength and pulse length of radiant energy used for annealing | Somit Talwar, Andrew M. Hawryluk | 2001-12-04 |
| 6072251 | Magnetically positioned X-Y stage having six degrees of freedom | — | 2000-06-06 |
| 5886432 | Magnetically-positioned X-Y stage having six-degrees of freedom | — | 1999-03-23 |
| 5822066 | Point diffraction interferometer and pin mirror for use therewith | Hwan J. Jeong | 1998-10-13 |
| 5691541 | Maskless, reticle-free, lithography | Natale M. Ceglio | 1997-11-25 |
| 5621813 | Pattern recognition alignment system | Robert L. Brown, Hwan J. Jeong, David S. Pan, Richard B. Ward, Mark S. Wanta | 1997-04-15 |
| 5585972 | Arbitrarily wide lens array with an image field to span the width of a substrate | — | 1996-12-17 |
| 5557469 | Beamsplitter in single fold optical system and optical variable magnification method and system | Hwan J. Jeong | 1996-09-17 |
| 5402205 | Alignment system for a Half-Field Dyson projection system | Gerald Alonzo, Hwan J. Jeong | 1995-03-28 |
| 5329332 | System for achieving a parallel relationship between surfaces of wafer and reticle of half-field dyson stepper | Gerald Alonzo, Hwan J. Jeong | 1994-07-12 |
| 5266790 | Focusing technique suitable for use with an unpatterned specular substrate | Gerald Alonzo, Hwan J. Jeong | 1993-11-30 |
| 5164794 | Optical reticle inspection system and method | — | 1992-11-17 |
| 5040882 | Unit magnification optical system with improved reflective reticle | — | 1991-08-20 |
| 5003345 | Apparatus and method for aligning and focusing an image of a reticle onto a semiconductor wafer | — | 1991-03-26 |
| 4964705 | Unit magnification optical system | — | 1990-10-23 |
| 4734829 | Short arc lamp image transformer | Frederick Y. Wu | 1988-03-29 |
| 4650315 | Optical lithographic system | — | 1987-03-17 |
| 4549084 | Alignment and focusing system for a scanning mask aligner | — | 1985-10-22 |
| 4545683 | Wafer alignment device | — | 1985-10-08 |
| 4530565 | Optical transformer using curved strip waveguides to achieve a nearly unchanged F/number | — | 1985-07-23 |
| 4516852 | Method and apparatus for measuring intensity variation in a light source | Raymond Liu | 1985-05-14 |
| 4362384 | Means for providing uniform illumination to a light sensitive element | Orest Engelbrecht | 1982-12-07 |
| 4353087 | Automatic mask alignment | Daniel G. Berry | 1982-10-05 |
| 4344160 | Automatic wafer focusing and flattening system | Fred C. Gabriel | 1982-08-10 |
| 4288148 | Beam-splitting optical system | Abe Offner | 1981-09-08 |