Issued Patents All Time
Showing 26–50 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7744274 | Methods and apparatus for temperature measurement and control on a remote substrate surface | Boris Grek, Michael Weitzel | 2010-06-29 |
| 7731798 | Heated chuck for laser thermal processing | Iqbal Shareef, Igor Landau, Somit Talwar, Michael O. Thompson, Ivelin Angelov +1 more | 2010-06-08 |
| 7671966 | Computer architecture for and method of high-resolution imaging using a low-resolution image transducer | — | 2010-03-02 |
| 7514305 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Andrew M. Hawryluk, Boris Grek | 2009-04-07 |
| 7494942 | Laser thermal annealing of lightly doped silicon substrates | Somit Talwar | 2009-02-24 |
| 7399945 | Method of thermal processing a substrate with direct and redirected reflected radiation | Somit Talwar | 2008-07-15 |
| 7326877 | Laser thermal processing chuck with a thermal compensating heater module | Iqbal Shareef, Igor Landau, Somit Talwar, Michael O. Thompson, Ivelin Angelov +1 more | 2008-02-05 |
| 7253376 | Methods and apparatus for truncating an image formed with coherent radiation | Shiyu Zhang, Igor Landau, Arnold W. Lungershausen, Casey Donaher | 2007-08-07 |
| 7238915 | Methods and apparatus for irradiating a substrate to avoid substrate edge damage | Boris Grek | 2007-07-03 |
| 7157660 | Laser scanning apparatus and methods for thermal processing | Somit Talwar, Michael O. Thompson | 2007-01-02 |
| 7154066 | Laser scanning apparatus and methods for thermal processing | Somit Talwar | 2006-12-26 |
| 7148159 | Laser thermal annealing of lightly doped silicon substrates | Somit Talwar, Michael O. Thompson, Boris Grek | 2006-12-12 |
| 7098155 | Laser thermal annealing of lightly doped silicon substrates | Somit Talwar | 2006-08-29 |
| 6833908 | Computer architecture for and method of high-resolution imaging using a low-resolution image transducer | — | 2004-12-21 |
| 6825101 | Methods for annealing a substrate and article produced by such methods | Andrew M. Hawryluk, Somit Talwar | 2004-11-30 |
| 6809888 | Apparatus and methods for thermal reduction of optical distortion | — | 2004-10-26 |
| 6753947 | Lithography system and method for device manufacture | Dan Meisburger | 2004-06-22 |
| 6747245 | Laser scanning apparatus and methods for thermal processing | Somit Talwar, Michael O. Thompson | 2004-06-08 |
| 6731376 | System and method for reducing colinearity effects in manufacturing microdevices | — | 2004-05-04 |
| 6671235 | Method of and apparatus for defining disk tracks in magnetic recording media | Andrew M. Hawryluk, Robert D. Hempstead | 2003-12-30 |
| 6556279 | Motion compensation system and method for lithography | Dan Meisburger | 2003-04-29 |
| 6531681 | Apparatus having line source of radiant energy for exposing a substrate | Andrew M. Hawryluk, Hwan J. Jeong | 2003-03-11 |
| 6479821 | Thermally induced phase switch for laser thermal processing | Andrew M. Hawryluk, Somit Talwar, Yun Wang, Michael O. Thompson | 2002-11-12 |
| 6441514 | Magnetically positioned X-Y stage having six degrees of freedom | — | 2002-08-27 |
| 6381077 | Scanning microlithographic apparatus and method for projecting a large field-of-view image on a substrate | Hwan J. Jeong | 2002-04-30 |