Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5621813 | Pattern recognition alignment system | Robert L. Brown, Hwan J. Jeong, David A. Markle, David S. Pan, Richard B. Ward | 1997-04-15 |
| 4880309 | Dark field target design system for alignment of semiconductor wafers | — | 1989-11-14 |