Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10363585 | Cleaning solution, method of removing a removal target and method of etching a substrate using said cleaning solution | Ryusuke Uchida | 2019-07-30 |
| 9535330 | Stripping solution for photolithography and pattern formation method | Naohisa Ueno, Takuya Ohhashi | 2017-01-03 |
| 8980534 | Method for forming fine pattern, and coating agent for pattern fining | Takumi Namiki, Mai Sugawara | 2015-03-17 |
| 8216775 | Anti-reflection film forming material, and method for forming resist pattern using the same | Takako Hirosaki, Masahiro Masujima, Atsushi Sawano, Jun Koshiyama | 2012-07-10 |