Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9796953 | Cleaning liquid for lithography and method for cleaning substrate | Tomoya Kumagai, Mai Sugawara | 2017-10-24 |
| 9535330 | Stripping solution for photolithography and pattern formation method | Yuriko Shirai, Takuya Ohhashi | 2017-01-03 |
| 9436094 | Stripping solution for photolithography and pattern formation method | Daijiro Mori, Takayuki Haraguchi | 2016-09-06 |
| 9291905 | Developing solution for photolithography, method for forming resist pattern, and method and apparatus for producing developing solution for photolithography | Tomoya Kumagai, Jun Koshiyama | 2016-03-22 |
| 8410296 | Surface treatment agent and surface treatment method | Masaaki Yoshida, Mai Sugawara, Jun Koshiyama | 2013-04-02 |
| 8142980 | Over-coating agent for forming fine patterns and a method of forming fine patterns using such agent | Yoshiki Sugeta, Fumitake Kaneko, Toshikazu Tachikawa | 2012-03-27 |
| 7579138 | Method for forming micropattern | Yoshiki Sugeta | 2009-08-25 |