Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11898081 | Ruthenium-etching solution, method for manufacturing ruthenium-etching solution, method for processing object to be processed, and method for manufacturing ruthenium-containing wiring | Yukihisa Wada | 2024-02-13 |
| 11120994 | Etching solution, and method of producing semiconductor element | Yukihisa Wada, Mai Sugawara | 2021-09-14 |
| 10242875 | Impurity diffusion agent composition and method for manufacturing semiconductor substrate | Yoshihiro Sawada, Yu TAKAHASHI | 2019-03-26 |
| 9856382 | Homogeneous coating solution and production method thereof, light-absorbing layer of solar cell and production method thereof, and solar cell and production method thereof | Yueh-Chun Liao, Hiroyuki Iida, Akimasa Nakamura | 2018-01-02 |
| 9535330 | Stripping solution for photolithography and pattern formation method | Yuriko Shirai, Naohisa Ueno | 2017-01-03 |
| 9133352 | Surface treatment agent and surface treatment method | Mai Sugawara | 2015-09-15 |
| 8802610 | Cleaning liquid and anticorrosive agent comprising a mercapto compound and solvent | Tomoya Kumagai, Takahiro Eto, Daijiro Mori, Takayuki Haraguchi | 2014-08-12 |
| 8354365 | Cleaning liquid for lithography and method for forming wiring | Masaru Takahama, Takahiro Eto, Daijiro Mori, Shigeru Yokoi | 2013-01-15 |
| 8206509 | Cleaning liquid for lithography and method for forming wiring | Takahiro Eto, Masaru Takahama, Daijiro Mori, Akira Kumazawa | 2012-06-26 |