Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428737 | Cleaning liquid used for cleaning metal resists, and cleaning method using cleaning liquid | Tomoya Kumagai | 2025-09-30 |
| 12428611 | Cleaning liquid used for cleaning metal resists, and cleaning method using cleaning liquid | Tomoya Kumagai | 2025-09-30 |
| 11965111 | Surface treatment agent and surface treatment method | Takumi Namiki, Emi Uchida | 2024-04-23 |
| 11120994 | Etching solution, and method of producing semiconductor element | Yukihisa Wada, Takuya Ohhashi | 2021-09-14 |
| 9796953 | Cleaning liquid for lithography and method for cleaning substrate | Tomoya Kumagai, Naohisa Ueno | 2017-10-24 |
| 9796879 | Film-forming material | Daijiro Mori, Akira Kumazawa | 2017-10-24 |
| 9405199 | Method for forming resist pattern | Kiyoshi Ishikawa | 2016-08-02 |
| 9133352 | Surface treatment agent and surface treatment method | Takuya Ohhashi | 2015-09-15 |
| 8980534 | Method for forming fine pattern, and coating agent for pattern fining | Takumi Namiki, Yuriko Shirai | 2015-03-17 |
| 8623131 | Surface treatment agent and surface treatment method | Masaaki Yoshida, Jun Koshiyama | 2014-01-07 |
| 8410296 | Surface treatment agent and surface treatment method | Masaaki Yoshida, Naohisa Ueno, Jun Koshiyama | 2013-04-02 |