Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11686002 | Method for manufacturing ruthenium wiring | Yukihisa Wada, Shinya Koga, Kazuhiro Takahashi, Natsumi OKAWA | 2023-06-27 |
| 11518937 | Etching solution and method for manufacturing semiconductor element | Yukihisa Wada | 2022-12-06 |
| 10093815 | Surface treatment agent and surface treatment method | Akira Kumazawa | 2018-10-09 |
| 9868090 | Process for preparing chemical liquid of silylating agent and surface treatment method | Kiyoshi Ishikawa, Akira Kumazawa | 2018-01-16 |
| 9796879 | Film-forming material | Akira Kumazawa, Mai Sugawara | 2017-10-24 |
| 9703202 | Surface treatment process and surface treatment liquid | Akira Kumazawa | 2017-07-11 |
| 9436094 | Stripping solution for photolithography and pattern formation method | Naohisa Ueno, Takayuki Haraguchi | 2016-09-06 |
| 9250534 | Nonaqueous cleaning liquid and method for etching processing of silicon substrate | Takayuki Haraguchi | 2016-02-02 |
| 8802610 | Cleaning liquid and anticorrosive agent comprising a mercapto compound and solvent | Tomoya Kumagai, Takuya Ohhashi, Takahiro Eto, Takayuki Haraguchi | 2014-08-12 |
| 8354365 | Cleaning liquid for lithography and method for forming wiring | Takuya Ohhashi, Masaru Takahama, Takahiro Eto, Shigeru Yokoi | 2013-01-15 |
| 8206509 | Cleaning liquid for lithography and method for forming wiring | Takahiro Eto, Takuya Ohhashi, Masaru Takahama, Akira Kumazawa | 2012-06-26 |