Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9352542 | Processing method and processing apparatus | Yoshihiro Inao, Atsuo Kajima, Takuma Hasegawa, Koki Tamura | 2016-05-31 |
| 8859187 | Method of forming resist pattern and negative resist composition | Ken Tanaka, Sho Abe | 2014-10-14 |
| 8803026 | Laser machining device and bellows device | — | 2014-08-12 |
| 8697345 | Photoresist stripping solution and a method of stripping photoresists using the same | Kazumasa Wakiya | 2014-04-15 |
| 8685910 | Cleaning liquid used in photolithography and a method for treating substrate therewith | Kazumasa Wakiya, Koji Saito | 2014-04-01 |
| 8648279 | Process control apparatus and laser processing apparatus | Keiji Takahashi, Tomonori Mukae, Tatsuya Yamamoto | 2014-02-11 |
| 8354215 | Method for stripping photoresist | Kazumasa Wakiya, Takayuki Haraguchi | 2013-01-15 |
| 8354365 | Cleaning liquid for lithography and method for forming wiring | Takuya Ohhashi, Masaru Takahama, Takahiro Eto, Daijiro Mori | 2013-01-15 |
| 8212176 | Machining head, nozzle changer and laser beam machining apparatus | Takashi Akiyama, Masahiko Hasegawa, Kazunobu Katase | 2012-07-03 |
| 8192923 | Photoresist stripping solution and a method of stripping photoresists using the same | Kazumasa Wakiya | 2012-06-05 |
| 8158568 | Cleaning liquid used in process for forming dual damascene structure and a process for treating substrate therewith | Kazumasa Wakiya | 2012-04-17 |
| D654518 | Laser beam machine | Takanori Miyake | 2012-02-21 |
| 8114825 | Photoresist stripping solution | Atsushi Yamanouchi | 2012-02-14 |
| 8097397 | Material for formation of protective film, method for formation of photoresist pattern, and solution for washing/removal of protective film | Toshikazu Takayama, Keita Ishiduka, Hideo Hada | 2012-01-17 |
| 7442675 | Cleaning composition and method of cleaning semiconductor substrate | Kazumasa Wakiya, Takayuki Haraguchi, Makarem A. Hussein, Lana Jong, Shan Clark | 2008-10-28 |
| 7129020 | Liquid coating composition for forming a top antireflective film and photoresist laminate using the same, as well as method for forming photoresist pattern | Kazumasa Wakiya, Naotaka Kubota, Takayuki Haraguchi | 2006-10-31 |
| 6894248 | Laser beam machining apparatus | Yoshifumi Arakawa | 2005-05-17 |
| 6746963 | Method for processing coating film and method for manufacturing semiconductor element with use of the same method | Yasushi Fujii, Hiroyuki Iida, Isao Sato, Kazumasa Wakiya | 2004-06-08 |
| 6416930 | Composition for lithographic anti-reflection coating, and resist laminate using the same | Kazumasa Wakiya, Naotaka Kubota, Masakazu Kobayashi | 2002-07-09 |
| 5160724 | Barium sulfate contrast medium for X-ray examination of the large intestine | Yoshito Tonariya, Yukihito Wada, Kazuhiro Yamaguchi, Tomio Yamazaki, Isamu Sakai +2 more | 1992-11-03 |