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Embedded memory device having MIM capacitor formed in excavated structure |
Steven J. Keating, Nick Lindert, Nadia M. Rahhal-Orabi, Brian S. Doyle, Satyarth Suri +2 more |
2015-12-29 |
| 8441057 |
Embedded memory device having MIM capacitor formed in excavated structure |
Steven J. Keating, Nick Lindert, Nadia M. Rahhal-Orabi, Brian S. Doyle, Satyarth Suri +2 more |
2013-05-14 |
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Method of patterning a metal on a vertical sidewall of an excavated feature, method of forming an embedded MIM capacitor using same, and embedded memory device produced thereby |
Steven J. Keating, Nick Lindert, Nadia M. Rahhal-Orabi, Brian S. Doyle, Satyarth Suri +2 more |
2011-04-19 |
| 7442675 |
Cleaning composition and method of cleaning semiconductor substrate |
Shigeru Yokoi, Kazumasa Wakiya, Takayuki Haraguchi, Makarem A. Hussein, Shan Clark |
2008-10-28 |
| 6600076 |
Cleavable, water-soluble surfactants |
Nicholas Abbott |
2003-07-29 |
