Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9962915 | Bonding method and bonding apparatus | Atsushi Miyanari, Shigeru Kato, Takahiro Setaka, Shingo Ishida | 2018-05-08 |
| 9682532 | Laminated body and method for separating laminated body | Atsushi Kubo, Hirofumi Imai, Koki Tamura, Takahiro Yoshioka, Yasushi Fujii | 2017-06-20 |
| 9653337 | Transport arm, transport apparatus and transport method | Satoshi Kobari, Akihiko Nakamura | 2017-05-16 |
| 9627235 | Supporting member separation method | Yasumasa Iwata, Akihiko Nakamura, Shinji Takase, Takahiro Yoshioka | 2017-04-18 |
| 9548232 | Attaching apparatus | Junichi Katsuragawa, Shigeru Kato | 2017-01-17 |
| 9492986 | Laminate and method for separating the same | Yasushi Fujii, Atsushi Matsushita, Koki Tamura, Atsushi Kubo | 2016-11-15 |
| 9484238 | Attachment method | Shigeru Kato, Yasumasa Iwata, Yasushi Fujii | 2016-11-01 |
| 9352542 | Processing method and processing apparatus | Atsuo Kajima, Takuma Hasegawa, Koki Tamura, Shigeru Yokoi | 2016-05-31 |
| 9337074 | Attaching device and attaching method | Shigeru Kato, Shugo Tsushima, Junichi Katsuragawa, Satoshi Kobari, Akihiko Nakamura | 2016-05-10 |
| 9308715 | Laminate and method for separating the same | Hirofumi Imai, Koki Tamura, Atsushi Kubo, Takahiro Yoshioka, Yasushi Fujii | 2016-04-12 |
| 9281225 | Substrate processing apparatus and substrate processing method | — | 2016-03-08 |
| 9272494 | Sticking apparatus and sticking method | Akihiko Nakamura, Shigeru Kato | 2016-03-01 |
| 9238357 | Supporting member separation apparatus and supporting member separation method | Shinji Takase, Akihiko Nakamura | 2016-01-19 |
| 9048311 | Laminate and method for separating the same | Yasushi Fujii, Atsushi Matsushita, Koki Tamura, Atsushi Kubo | 2015-06-02 |
| 8931535 | Attaching device and attaching apparatus for supporting plate, and attaching method for supporting plate | Akihiko Nakamura, Atsushi Miyanari | 2015-01-13 |
| 8882096 | Perforated support plate | Akihiko Nakamura, Atsushi Miyanari, Yasumasa Iwata | 2014-11-11 |
| 8449691 | Liquid solvent abutment unit | Akihiko Nakamura, Atsushi Miyanari, Yasumasa Iwata | 2013-05-28 |
| 8426543 | Adhesive composition and adhesive film | Takahiro Asai, Koichi Misumi, Atsushi Miyanari, Akihiko Nakamura | 2013-04-23 |
| 8377256 | Stripping device and stripping method | Kimihiro Nakada, Yasumasa Iwata, Akihiko Nakamura, Satoshi Kobari | 2013-02-19 |
| 8354157 | Support plate, method for producing the same, and method for processing substrate | Hirofumi Imai, Koki Tamura, Takahiro Asai, Takahiro Yoshioka | 2013-01-15 |
| 8302651 | Stripping device and stripping method | Kimihiro Nakada, Yasumasa Iwata, Akihiko Nakamura, Satoshi Kobari | 2012-11-06 |
| 8298365 | Sticking method and sticking apparatus | Hirofumi Imai, Koki Tamura, Takahiro Asai, Takahiro Yoshioka | 2012-10-30 |
| 8297331 | Separating apparatus and separating method | Akihiko Nakamura, Yasumasa Iwata | 2012-10-30 |
| 8186410 | Separating device | Akihiko Nakamura, Junichi Katsuragawa, Atsushi Miyanari, Yasumasa Iwata | 2012-05-29 |
| 8167687 | Method of thinning wafer and support plate | Akihiko Nakamura, Atsushi Miyanari, Yasumasa Iwata | 2012-05-01 |