Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11802240 | Silicon etching solution, silicon etching method, and method of producing silicon fin structure | Ming-Yen Chung | 2023-10-31 |
| 11306248 | Silicon etching solution, silicon etching method, and method of producing silicon fin structure | Ming-Yen Chung | 2022-04-19 |
| 8354365 | Cleaning liquid for lithography and method for forming wiring | Takuya Ohhashi, Takahiro Eto, Daijiro Mori, Shigeru Yokoi | 2013-01-15 |
| 8206509 | Cleaning liquid for lithography and method for forming wiring | Takahiro Eto, Takuya Ohhashi, Daijiro Mori, Akira Kumazawa | 2012-06-26 |
| 7939590 | Composition for forming silica-based coating film | Hiroyuki Iida | 2011-05-10 |