Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7935393 | Method and system for improving sidewall coverage in a deposition system | Shigeru Mizuno, Takashi Sakuma | 2011-05-03 |
| 7799681 | Method for forming a ruthenium metal cap layer | Kenji Suzuki, Frank M. Cerio, Jr., Miho Jomen, Shigeru Mizuno, Tadahiro Ishizaka | 2010-09-21 |
| 7790626 | Plasma sputtering film deposition method and equipment | Taro Ikeda, Kenji Suzuki, Tatsuo Hatano | 2010-09-07 |
| 6451682 | Method of forming interconnect film | Takao Fujikawa, Makoto Kadoguchi, Kohei Suzuki, Tomoyasu Kondou, Yoji Taguchi | 2002-09-17 |
| 6299739 | Method of forming metal wiring film | Takao Fujikawa, Takahiko Ishii, Yutaka Narukawa, Makoto Kadoguchi, Tomoyasu Kondou +1 more | 2001-10-09 |