Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8946983 | Phosphor-containing sheet, LED light emitting device using the same, and method for manufacturing LED | Nobuo Matsumura, Takejiro INOUE, Hironobu Sadakuni, Yutake Ishida, Kazunari Kawamoto +1 more | 2015-02-03 |
| 8915999 | Shower plate sintered integrally with gas release hole member and method for manufacturing the same | Masahiro Okesaku, Tadahiro Ohmi, Takaaki Matsuoka, Toshihisa Nozawa, Atsutoshi Inokuchi +1 more | 2014-12-23 |
| 8716114 | Semiconductor device manufacturing method and semiconductor device | Tadahiro Ohmi, Akinobu Teramoto, Takaaki Matsuoka | 2014-05-06 |
| 8573151 | Microwave plasma processing apparatus, dielectric window for use in the microwave plasma processing apparatus, and method for manufacturing the dielectric window | Tadahiro Ohmi, Masaki Hirayama, Yasuyuki Shirai, Masafumi Kitano, Kohei Watanuki +2 more | 2013-11-05 |
| 8568577 | Magnetron sputtering apparatus | Tadahiro Ohmi, Takaaki Matsuoka | 2013-10-29 |
| 8535494 | Rotary magnet sputtering apparatus | Tadahiro Ohmi, Takaaki Matsuoka | 2013-09-17 |
| 8496792 | Rotary magnet sputtering apparatus | Tadahiro Ohmi, Takaaki Matsuoka | 2013-07-30 |
| 8399862 | Ion implanting apparatus and ion implanting method | Tadahiro Ohmi, Akinobu Teramoto, Takaaki Matsuoka | 2013-03-19 |
| 8372200 | Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method | Masahiro Okesaku, Tadahiro Ohmi, Kiyotaka Ishibashi | 2013-02-12 |
| 7879182 | Shower plate, plasma processing apparatus, and product manufacturing method | Tadahiro Ohmi, Masaki Hirayama | 2011-02-01 |
| 7670454 | Plasma processing apparatus | Tadahiro Ohmi, Masaki Hirayama, Shigetoshi Sugawa | 2010-03-02 |
| 7650907 | Hydraulic control apparatus | Takeharu Matsuzaki, Shigeto Nakajima, Tadashi Noguchi | 2010-01-26 |
| 7645317 | Mixed power for powder metallurgy, green compact thereof, and sintered body | Takayasu Fujiura, Yasuko Yakou, Satoshi Nishida, Yuuji Taniguchi | 2010-01-12 |
| 7528074 | Method of manufacturing a semiconductor device and method of etching an insulating film | Tadahiro Ohmi | 2009-05-05 |
| 7404991 | Device and control method for micro wave plasma processing | Tadahiro Ohmi, Masaki Hirayama, Shigetoshi Sugawa | 2008-07-29 |
| 7325511 | Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus | Naohisa Goto, Tadahiro Ohmi, Masaki Hirayama | 2008-02-05 |
| 7287375 | Hydraulic control device and industrial vehicle with hydraulic control device | Takeharu Matsuzaki, Shigeto Nakajima, Yasuhiro Maeda, Keinosuke Ichikawa | 2007-10-30 |
| 7273136 | Parking brake device of vehicle | Keinosuke Ichikawa, Yasuhiro Maeda, Hiroyuki Horiuchi | 2007-09-25 |
| 7141756 | Microwave plasma processing apparatus, plasma ignition method, plasma forming method, and plasma processing method | Tadahiro Ohmi, Masaki Hirayama, Shigetoshi Sugawa | 2006-11-28 |
| 7115184 | Plasma processing device | Tadahiro Ohmi, Masaki Hirayama, Shigetoshi Sugawa | 2006-10-03 |
| 7097735 | Plasma processing device | Tadahiro Ohmi, Masaki Hirayama, Shigetoshi Sugawa | 2006-08-29 |
| 7083701 | Device and method for plasma processing, and slow-wave plate | Tadahiro Ohmi, Masaki Hirayama, Shigetoshi Sugawa | 2006-08-01 |
| 6893781 | Color filter, liquid crystal display device, and method for making color filter | Harushi Nonaka, Tetsuo Yamashita | 2005-05-17 |
| 6818852 | Microwave plasma processing device, plasma processing method, and microwave radiating member | Tadahiro Ohmi, Masaki Hirayama | 2004-11-16 |
| 6736392 | Image forming apparatus | Shigeru Horiguchi, Masahiro Nakajima, Yuji Suzuki | 2004-05-18 |