Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10354872 | High-precision dispense system with meniscus control | Anton J. deVilliers, Rodney L. Robison, Ronald Nasman, David Travis, James Grootegoed +3 more | 2019-07-16 |
| 9086631 | EUV resist sensitivity reduction | Lior Huli | 2015-07-21 |
| 8975009 | Track processing to remove organic films in directed self-assembly chemo-epitaxy applications | Mark H. Somervell, Lior Huli | 2015-03-10 |
| 7949618 | Training a machine learning system to determine photoresist parameters | Joerg Bischoff, Manuel Madriaga | 2011-05-24 |
| 7728976 | Determining photoresist parameters using optical metrology | Joerg Bischoff | 2010-06-01 |
| 7567353 | Automated process control using optical metrology and photoresist parameters | Joerg Bischoff, Manuel Madriaga | 2009-07-28 |