Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11932529 | Isolated protrusion/recession features in microelectromechanical systems | Patrick Ian Oden, Sandra Zheng, William C. McDonald | 2024-03-19 |
| 10589980 | Isolated protrusion/recession features in a micro electro mechanical system | Patrick Ian Oden, Sandra Zheng, William C. McDonald | 2020-03-17 |
| 9864188 | Operation/margin enhancement feature for surface-MEMS structure; sculpting raised address electrode | Patrick Ian Oden, Sandra Zheng, William C. McDonald, Lance W. Barron | 2018-01-09 |
| 9448484 | Sloped electrode element for a torsional spatial light modulator | Patrick Ian Oden, Sandra Zheng, William C. McDonald, Lance W. Barron | 2016-09-20 |
| 9340415 | MEMS device with non-planar features | Patrick Ian Oden, Robert S. Black | 2016-05-17 |
| 7871931 | Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same | Anthony DiCarlo, Jingqiu Chen, Yanghua He, David A. Rothenbury | 2011-01-18 |
| 7781311 | System and method for filling vias | Mark Franklin, Georgina Marie Jabbour | 2010-08-24 |
| 7262900 | Utilizing a protective plug to maintain the integrity of the FTP shrink hinge | Anthony DiCarlo, Rabah Mezenner, Mark Franklin, George Harakas | 2007-08-28 |
| 6908778 | Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices | Mark Strumpell, David Gillespie | 2005-06-21 |
| 6614576 | Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices | Mark Strumpell, David Gillespie | 2003-09-02 |
| 5567334 | Method for creating a digital micromirror device using an aluminum hard mask | Henry W. Trombley, Scott H. Prengle | 1996-10-22 |
| 5526951 | Fabrication method for digital micro-mirror devices using low temperature CVD | Wayne E. Bailey | 1996-06-18 |
| 5473187 | Hybrids semiconductor circuit | Emily A. Groves, Douglas E. Paradis, Charles P. Monaghan, Barry Lanier, Thomas D. Bonifield +2 more | 1995-12-05 |
| 5454906 | Method of providing sacrificial spacer for micro-mechanical devices | Scott H. Prengle | 1995-10-03 |
| 5405807 | Semiconductor hybrids and method of making same | Emily A. Groves, Douglas E. Paradis, Charles P. Monaghan, Barry Lanier, Thomas D. Bonifield +1 more | 1995-04-11 |
| 5298733 | Infrared focal plane array with integral slot shield using spin-on epoxy and method of making same | John Charles Ehmke | 1994-03-29 |
| 5244839 | Semiconductor hybrids and method of making same | Emily A. Groves, Douglas E. Paradis, Charles P. Monaghan, Barry Lanier, Thomas D. Bonifield +2 more | 1993-09-14 |