| 11932529 |
Isolated protrusion/recession features in microelectromechanical systems |
Patrick Ian Oden, Sandra Zheng, William C. McDonald |
2024-03-19 |
| 10589980 |
Isolated protrusion/recession features in a micro electro mechanical system |
Patrick Ian Oden, Sandra Zheng, William C. McDonald |
2020-03-17 |
| 9864188 |
Operation/margin enhancement feature for surface-MEMS structure; sculpting raised address electrode |
Patrick Ian Oden, Sandra Zheng, William C. McDonald, Lance W. Barron |
2018-01-09 |
| 9448484 |
Sloped electrode element for a torsional spatial light modulator |
Patrick Ian Oden, Sandra Zheng, William C. McDonald, Lance W. Barron |
2016-09-20 |
| 9340415 |
MEMS device with non-planar features |
Patrick Ian Oden, Robert S. Black |
2016-05-17 |
| 7871931 |
Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same |
Anthony DiCarlo, Jingqiu Chen, Yanghua He, David A. Rothenbury |
2011-01-18 |
| 7781311 |
System and method for filling vias |
Mark Franklin, Georgina Marie Jabbour |
2010-08-24 |
| 7262900 |
Utilizing a protective plug to maintain the integrity of the FTP shrink hinge |
Anthony DiCarlo, Rabah Mezenner, Mark Franklin, George Harakas |
2007-08-28 |
| 6908778 |
Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices |
Mark Strumpell, David Gillespie |
2005-06-21 |
| 6614576 |
Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices |
Mark Strumpell, David Gillespie |
2003-09-02 |
| 5567334 |
Method for creating a digital micromirror device using an aluminum hard mask |
Henry W. Trombley, Scott H. Prengle |
1996-10-22 |
| 5526951 |
Fabrication method for digital micro-mirror devices using low temperature CVD |
Wayne E. Bailey |
1996-06-18 |
| 5473187 |
Hybrids semiconductor circuit |
Emily A. Groves, Douglas E. Paradis, Charles P. Monaghan, Barry Lanier, Thomas D. Bonifield +2 more |
1995-12-05 |
| 5454906 |
Method of providing sacrificial spacer for micro-mechanical devices |
Scott H. Prengle |
1995-10-03 |
| 5405807 |
Semiconductor hybrids and method of making same |
Emily A. Groves, Douglas E. Paradis, Charles P. Monaghan, Barry Lanier, Thomas D. Bonifield +1 more |
1995-04-11 |
| 5298733 |
Infrared focal plane array with integral slot shield using spin-on epoxy and method of making same |
John Charles Ehmke |
1994-03-29 |
| 5244839 |
Semiconductor hybrids and method of making same |
Emily A. Groves, Douglas E. Paradis, Charles P. Monaghan, Barry Lanier, Thomas D. Bonifield +2 more |
1993-09-14 |