| 8219351 |
Methods and systems to align wafer signatures |
Karl Lynn Kenney |
2012-07-10 |
| 7987014 |
Systems and methods for selecting wafer processing order for cyclical two pattern defect detection |
— |
2011-07-26 |
| 6067163 |
Automated substrate pattern recognition system |
Richard L. Guldi |
2000-05-23 |
| 6054367 |
Ion implant of the moat encroachment region of a LOCOS field isolation to increase the radiation hardness |
Emily A. Groves, Wayne E. Bailey, Homer K. Cheung |
2000-04-25 |
| 5978078 |
System and method for detecting particles on substrate-supporting chucks of photolithography equipment |
Sima Salamati-Saradh |
1999-11-02 |
| 5958517 |
System and method for cleaning nozzle delivering spin-on-glass to substrate |
Frank Poag, Richard L. Guldi, Paul C. Hashim |
1999-09-28 |
| 5839455 |
Enhanced high pressure cleansing system for wafer handling implements |
Virgil Q. Turner, William D. Light, Hilario T. Trevino, Richard L. Guldi, Frank Poag |
1998-11-24 |
| 5841543 |
Method and apparatus for verifying the presence of a material applied to a substrate |
Richard L. Guldi |
1998-11-24 |
| 5551165 |
Enhanced cleansing process for wafer handling implements |
Virgil Q. Turner, William D. Light, Hilario T. Trevino, Richard L. Guldi, Frank Poag |
1996-09-03 |
| 5473187 |
Hybrids semiconductor circuit |
James C. Baker, Emily A. Groves, Charles P. Monaghan, Barry Lanier, Thomas D. Bonifield +2 more |
1995-12-05 |
| 5405807 |
Semiconductor hybrids and method of making same |
James C. Baker, Emily A. Groves, Charles P. Monaghan, Barry Lanier, Thomas D. Bonifield +1 more |
1995-04-11 |
| 5244839 |
Semiconductor hybrids and method of making same |
James C. Baker, Emily A. Groves, Charles P. Monaghan, Barry Lanier, Thomas D. Bonifield +2 more |
1993-09-14 |