Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395102 | Method and apparatus for in-situ reticle cleaning at photolithography tool | Richard L. Guldi, David R. Wyke | 2002-05-28 |
| 6305097 | Apparatus for in-situ reticle cleaning at photolithography tool | Richard L. Guldi, David R. Wyke | 2001-10-23 |
| 6222228 | Method for reducing gate oxide damage caused by charging | Farris D. Malone, Ingrid G. Jenkins, David R. Wyke, Mary C. Adams | 2001-04-24 |
| 6218218 | Method for reducing gate oxide damage caused by charging | Farris D. Malone, Ingrid G. Jenkins, David R. Wyke, Mary C. Adams | 2001-04-17 |
| 5978078 | System and method for detecting particles on substrate-supporting chucks of photolithography equipment | Douglas E. Paradis | 1999-11-02 |