| 12172888 |
Anti-stiction enhancement of ruthenium contact |
James D. Huffman, Mickael Renault, Shibajyoti Ghosh Dastider, Willibrordus G. M. Van Den Hoek |
2024-12-24 |
| 11746002 |
Stable landing above RF conductor in MEMS device |
Robertus Petrus Van Kampen, Richard L. Knipe |
2023-09-05 |
| 11705298 |
Flexible MEMS device having hinged sections |
Robertus Petrus Van Kampen, Richard L. Knipe |
2023-07-18 |
| 11417487 |
MEMS RF-switch with near-zero impact landing |
Richard L. Knipe, Robertus Petrus Van Kampen, James D. Huffman |
2022-08-16 |
| 11261084 |
Method of forming a flexible MEMS device |
Robertus Petrus Van Kampen, Mickael Renault, Shibajyoti Ghosh Dastider, Jacques Marcel Muyango, Richard L. Knipe |
2022-03-01 |
| 10964505 |
Naturally closed MEMs switch for ESD protection |
Robertus Petrus Van Kampen, Roberto Gaddi, Richard L. Knipe |
2021-03-30 |
| 9966194 |
MEMS electrostatic actuator device for RF varactor applications |
Arun Gupta, William C. McDonald, Adam Joseph Fruehling, Ivan Kmecko, Divyanshu Agrawal +2 more |
2018-05-08 |
| 9864188 |
Operation/margin enhancement feature for surface-MEMS structure; sculpting raised address electrode |
Patrick Ian Oden, James C. Baker, Sandra Zheng, William C. McDonald |
2018-01-09 |
| 9709802 |
Micromirror apparatus and methods |
William C. McDonald, James Norman Hall, Mark F. Reed, Terry Alan Bartlett, Divyanshu Agrawal |
2017-07-18 |
| 9573801 |
MEMS electrostatic actuator device for RF varactor applications |
Arun Gupta, William C. McDonald, Adam Joseph Fruehling, Ivan Kmecko, Divyanshu Agrawal |
2017-02-21 |
| 9448484 |
Sloped electrode element for a torsional spatial light modulator |
Patrick Ian Oden, James C. Baker, Sandra Zheng, William C. McDonald |
2016-09-20 |
| 9348136 |
Micromirror apparatus and methods |
William C. McDonald, James Norman Hall, Mark F. Reed, Terry Alan Bartlett, Divyanshu Agrawal |
2016-05-24 |
| 9140898 |
Hermetically sealed MEMS device and its fabrication |
John Charles Ehmke, Virgil Ararao, Toby Linder |
2015-09-22 |
| 8975722 |
MEMS device and method of manufacture |
James Norman Hall, Cuiling Gong |
2015-03-10 |
| 8729657 |
MEMS device and method of manufacture |
James Norman Hall, Cuiling Gong |
2014-05-20 |
| 8617960 |
Silicon microphone transducer |
Marie Denison, Brian E. Goodlin, Wei-Yan Shih |
2013-12-31 |
| 8541850 |
Method and system for forming resonators over CMOS |
Arun Gupta, William C. McDonald |
2013-09-24 |
| 7576902 |
Spatial light modulator mirror metal having enhanced reflectivity |
Jason M. Neidrich |
2009-08-18 |