| 12339437 |
Bias voltage adjustment for a phase light modulator |
Patrick Ian Oden, James Norman Hall |
2025-06-24 |
|
| 12160084 |
MEMS-based phase spatial light modulating architecture |
James Norman Hall, Terry Alan Bartlett |
2024-12-03 |
$71,349,000 |
| 12135415 |
Electrostatic actuator with 4-bit digital electrode |
James Norman Hall, Kelly Taylor, Song Zheng |
2024-11-05 |
$80,393,000 |
| 12130425 |
Systems and apparatus for micromirror designs with electrode contact |
Ryan Savage |
2024-10-29 |
$41,373,000 |
| 11977220 |
Sculpted micromirror in a digital micromirror device |
James Norman Hall, Terry Alan Bartlett |
2024-05-07 |
$43,677,000 |
| 11932529 |
Isolated protrusion/recession features in microelectromechanical systems |
Patrick Ian Oden, James C. Baker, Sandra Zheng |
2024-03-19 |
$26,256,000 |
| 11256083 |
MEMS electrostatic actuator with linearized displacements |
James Norman Hall |
2022-02-22 |
$26,617,000 |
| 10589980 |
Isolated protrusion/recession features in a micro electro mechanical system |
Patrick Ian Oden, James C. Baker, Sandra Zheng |
2020-03-17 |
$18,075,000 |
| 10371939 |
Apparatus providing over-travel protection for actuators |
James Norman Hall, Adam Joseph Fruehling |
2019-08-06 |
$31,774,000 |
| 9966194 |
MEMS electrostatic actuator device for RF varactor applications |
Arun Gupta, Adam Joseph Fruehling, Ivan Kmecko, Lance W. Barron, Divyanshu Agrawal +2 more |
2018-05-08 |
$24,898,000 |
| 9864188 |
Operation/margin enhancement feature for surface-MEMS structure; sculpting raised address electrode |
Patrick Ian Oden, James C. Baker, Sandra Zheng, Lance W. Barron |
2018-01-09 |
$13,602,000 |
| 9709802 |
Micromirror apparatus and methods |
James Norman Hall, Mark F. Reed, Lance W. Barron, Terry Alan Bartlett, Divyanshu Agrawal |
2017-07-18 |
$13,773,000 |
| 9573801 |
MEMS electrostatic actuator device for RF varactor applications |
Arun Gupta, Adam Joseph Fruehling, Ivan Kmecko, Lance W. Barron, Divyanshu Agrawal |
2017-02-21 |
$11,965,000 |
| 9448484 |
Sloped electrode element for a torsional spatial light modulator |
Patrick Ian Oden, James C. Baker, Sandra Zheng, Lance W. Barron |
2016-09-20 |
$25,529,000 |
| 9348136 |
Micromirror apparatus and methods |
James Norman Hall, Mark F. Reed, Lance W. Barron, Terry Alan Bartlett, Divyanshu Agrawal |
2016-05-24 |
$12,387,000 |
| 9263973 |
MEMS electrostatic actuator |
Arun Gupta |
2016-02-16 |
$16,543,000 |
| 9040854 |
MEMS electrostatic actuator |
Arun Gupta |
2015-05-26 |
$25,137,000 |
| 8541850 |
Method and system for forming resonators over CMOS |
Arun Gupta, Lance W. Barron |
2013-09-24 |
$10,896,000 |
| 7355777 |
Energy storage structures using electromechanically active materials for micro electromechanical systems |
Patrick Ian Oden |
2008-04-08 |
$14,387,000 |
| 6891657 |
Damped control of a micromechanical device |
Gregory J. Hewlett |
2005-05-10 |
$25,858,000 |