| 12172888 |
Anti-stiction enhancement of ruthenium contact |
James D. Huffman, Shibajyoti Ghosh Dastider, Lance W. Barron, Willibrordus G. M. Van Den Hoek |
2024-12-24 |
| 12129168 |
Microelectronics package with vertically stacked MEMS device and controller device |
Julio C. Costa |
2024-10-29 |
| 12077431 |
MEMS device having decreased contact resistance |
Shibajyoti Ghosh Dastider, Jacques Marcel Muyango |
2024-09-03 |
| 11964866 |
MEMS device having uniform contacts |
Jacques Marcel Muyango, Shibajyoti Ghosh Dastider |
2024-04-23 |
| 11667516 |
MEMS device having uniform contacts |
Jacques Marcel Muyango, Shibajyoti Ghosh Dastider |
2023-06-06 |
| 11646289 |
RF devices with enhanced performance and methods of forming the same |
Julio C. Costa |
2023-05-09 |
| 11261084 |
Method of forming a flexible MEMS device |
Robertus Petrus Van Kampen, Lance W. Barron, Shibajyoti Ghosh Dastider, Jacques Marcel Muyango, Richard L. Knipe |
2022-03-01 |
| 10896787 |
Contact in RF-switch |
Robertus Petrus Van Kampen, James D. Huffman, Shibajyoti Ghosh Dastider, Jacques Marcel Muyango |
2021-01-19 |
| 10566163 |
MEMS RF-switch with controlled contact landing |
Robertus Petrus Van Kampen, Richard L. Knipe, Shibajyoti Ghosh Dastider, Jacques Marcel Muyango |
2020-02-18 |
| 10301173 |
RF MEMS electrodes with limited grain growth |
— |
2019-05-28 |
| 9908774 |
Method for achieving good adhesion between dielectric and organic material |
— |
2018-03-06 |
| 9711290 |
Curved RF electrode for improved Cmax |
Vikram Joshi, Robertus Petrus Van Kampen, Thomas L. Maguire, Richard L. Knipe |
2017-07-18 |
| 9708177 |
MEMS device anchoring |
Robertus Petrus Van Kampen, Vikram Joshi, Richard L. Knipe, Anartz Unamuno |
2017-07-18 |
| 9487395 |
Method of forming planar sacrificial material in a MEMS device |
Brian I. Troy, James F. Bobey, Joseph Damian Gordon Lacey, Thomas L. Maguire |
2016-11-08 |
| 8921953 |
Method for MEMS device fabrication and device formed |
Joseph Damian Gordon Lacey, Vikram Joshi, Thomas L. Maguire |
2014-12-30 |
| 8921165 |
Elimination of silicon residues from MEMS cavity floor |
Brian I. Troy, Thomas L. Maguire, Joseph Damian Gordon Lacey, James F. Bobey |
2014-12-30 |
| 8513043 |
Method for MEMS device fabrication and device formed |
Joseph Damian Gordon Lacey, Vikram Joshi, Thomas L. Maguire |
2013-08-20 |
| 8395249 |
Sealed cavity |
— |
2013-03-12 |
| 7993950 |
System and method of encapsulation |
Joseph Damian Gordon Lacey, Vikram Joshi, James F. Bobey, Robertus Petrus Van Kampen |
2011-08-09 |
| 7989262 |
Method of sealing a cavity |
— |
2011-08-02 |