Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9487395 | Method of forming planar sacrificial material in a MEMS device | Brian I. Troy, James F. Bobey, Mickael Renault, Thomas L. Maguire | 2016-11-08 |
| 8957485 | Fabrication of MEMS based cantilever switches by employing a split layer cantilever deposition scheme | — | 2015-02-17 |
| 8921165 | Elimination of silicon residues from MEMS cavity floor | Brian I. Troy, Mickael Renault, Thomas L. Maguire, James F. Bobey | 2014-12-30 |
| 8921953 | Method for MEMS device fabrication and device formed | Mickael Renault, Vikram Joshi, Thomas L. Maguire | 2014-12-30 |
| 8513043 | Method for MEMS device fabrication and device formed | Mickael Renault, Vikram Joshi, Thomas L. Maguire | 2013-08-20 |
| 8124527 | CMP process flow for MEMS | Thomas L. Maguire, Vikram Joshi, Dennis Yost | 2012-02-28 |
| 7993950 | System and method of encapsulation | Mickael Renault, Vikram Joshi, James F. Bobey, Robertus Petrus Van Kampen | 2011-08-09 |