Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9487395 | Method of forming planar sacrificial material in a MEMS device | Brian I. Troy, Mickael Renault, Joseph Damian Gordon Lacey, Thomas L. Maguire | 2016-11-08 |
| 8921165 | Elimination of silicon residues from MEMS cavity floor | Brian I. Troy, Mickael Renault, Thomas L. Maguire, Joseph Damian Gordon Lacey | 2014-12-30 |
| 7993950 | System and method of encapsulation | Joseph Damian Gordon Lacey, Mickael Renault, Vikram Joshi, Robertus Petrus Van Kampen | 2011-08-09 |