Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711290 | Curved RF electrode for improved Cmax | Mickael Renault, Vikram Joshi, Robertus Petrus Van Kampen, Richard L. Knipe | 2017-07-18 |
| 9487395 | Method of forming planar sacrificial material in a MEMS device | Brian I. Troy, James F. Bobey, Mickael Renault, Joseph Damian Gordon Lacey | 2016-11-08 |
| 8921165 | Elimination of silicon residues from MEMS cavity floor | Brian I. Troy, Mickael Renault, Joseph Damian Gordon Lacey, James F. Bobey | 2014-12-30 |
| 8921953 | Method for MEMS device fabrication and device formed | Mickael Renault, Joseph Damian Gordon Lacey, Vikram Joshi | 2014-12-30 |
| 8513043 | Method for MEMS device fabrication and device formed | Mickael Renault, Joseph Damian Gordon Lacey, Vikram Joshi | 2013-08-20 |
| 8124527 | CMP process flow for MEMS | Joseph Damian Gordon Lacey, Vikram Joshi, Dennis Yost | 2012-02-28 |