| 7871931 |
Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same |
Jingqiu Chen, Yanghua He, James C. Baker, David A. Rothenbury |
2011-01-18 |
| 7786662 |
Display using a movable electron field emitter and method of manufacture thereof |
— |
2010-08-31 |
| 7654677 |
Yokeless hidden hinge digital micromirror device |
Patrick Ian Oden, Richard L. Knipe, Rabah Mezenner, James D. Huffman |
2010-02-02 |
| 7483199 |
Yokeless hidden hinge digital micromirror device with double binge layer |
— |
2009-01-27 |
| 7450297 |
Unique method for manufacturing a digital micromirror device and a method for manufacturing a projection display system using the same |
Stephen Arion Meisner |
2008-11-11 |
| 7411713 |
Yokeless hidden hinge digital micromirror device with double binge layer |
— |
2008-08-12 |
| 7354865 |
Method for removal of pattern resist over patterned metal having an underlying spacer layer |
Lisa Wesneski |
2008-04-08 |
| 7262900 |
Utilizing a protective plug to maintain the integrity of the FTP shrink hinge |
Rabah Mezenner, James C. Baker, Mark Franklin, George Harakas |
2007-08-28 |
| 7252395 |
MEMS device deflection stop |
Patrick Ian Oden, Richard L. Knipe, Rabah Mezenner, James D. Huffman |
2007-08-07 |
| 7088486 |
Yokeless hidden hinge micromirror device with double binge layer |
— |
2006-08-08 |
| 7011415 |
Yokeless hidden hinge digital micromirror device |
Patrick Ian Oden, Richard L. Knipe, Rabah Mezenner, James D. Huffman |
2006-03-14 |
| 6870660 |
Digital micromirror device having mirror-attached spring tips |
— |
2005-03-22 |
| 6856446 |
Digital micromirror device having mirror-attached spring tips |
— |
2005-02-15 |
| 5602330 |
Non-contact force microscope having a coaxial cantilever-tip configuration |
Ralph V. Chamberlin |
1997-02-11 |
| 5509300 |
Non-contact force microscope having a coaxial cantilever-tip configuration |
Ralph V. Chamberlin |
1996-04-23 |