Patents per Year
Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11694920 | Substrate support device, thermal processing apparatus, substrate support method, and thermal processing method | — | 2023-07-04 | |
| 6607985 | Gate stack and etch process | Robert J. Kraft | 2003-08-19 | $55,391,000 |
| 6191457 | Integrated circuit structure having a bipolar transistor with a thick base oxide and a field effect transistor with a thin gate oxide | Robert H. Eklund | 2001-02-20 | $53,485,000 |
| 5910676 | Method for forming a thick base oxide in a BiCMOS process | Robert H. Eklund | 1999-06-08 | $61,961,000 |
| 5567334 | Method for creating a digital micromirror device using an aluminum hard mask | James C. Baker, Henry W. Trombley | 1996-10-22 | $10,207,000 |
| 5454906 | Method of providing sacrificial spacer for micro-mechanical devices | James C. Baker | 1995-10-03 | $7,096,000 |
| 5171702 | Method for forming a thick base oxide in a BiCMOS process | Robert H. Eklund | 1992-12-15 | $3,967,000 |