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Home › Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same

Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same

US Patent 7871931 · Granted Jan 18, 2011

Estimated economic value: $19,351,000 ⓘ

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