Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444263 | Method of chemical-vapor deposition of a material | Randhir Bubber, Sanjay Gopinath, Thomas R. Omstead, Mehrdad M. Moslehi | 2002-09-03 |
| 6391754 | Method of making an integrated circuit interconnect | — | 2002-05-21 |
| 6376372 | Approaches for mitigating the narrow poly-line effect in silicide formation | Pushkar Apte, Mehrdad M. Moslehi | 2002-04-23 |
| 6365502 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Mehrdad M. Moslehi, Boris Relja, Randhir Bubber, Lino Velo, Thomas R. Omstead +3 more | 2002-04-02 |
| 6339369 | Retrofittable vehicle collision warning apparatus | — | 2002-01-15 |
| 6294836 | Semiconductor chip interconnect barrier material and fabrication method | Mehrdad M. Moslehi, Randhir Bubber, Lino Velo | 2001-09-25 |
| 6204204 | Method and apparatus for depositing tantalum-based thin films with organmetallic precursor | Mehrdad M. Moslehi, Randhir Bubber, Lino Velo | 2001-03-20 |
| 6034356 | RTP lamp design for oxidation and annealing | — | 2000-03-07 |
| 5888899 | Method for copper doping of aluminum films | — | 1999-03-30 |
| 5762713 | RTP lamp design for oxidation and annealing | — | 1998-06-09 |
| 5760573 | Plasma density monitor and method | Steve S. Huang | 1998-06-02 |
| 5634237 | Self-guided, self-propelled, convertible cleaning apparatus | — | 1997-06-03 |
| 5601366 | Method for temperature measurement in rapid thermal process systems | — | 1997-02-11 |
| 5593924 | Use of a capping layer to attain low titanium-silicide sheet resistance and uniform silicide thickness for sub-micron silicon and polysilicon lines | Pushkar Apte | 1997-01-14 |
| 5591493 | Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber | Cecil J. Davis, Robert T. Matthews | 1997-01-07 |
| 5580385 | Structure and method for incorporating an inductively coupled plasma source in a plasma processing chamber | Cecil J. Davis, Robert T. Matthews | 1996-12-03 |
| 5501637 | Temperature sensor and method | Walter M. Duncan, Francis G. Celii, Steven A. Henck, Douglas L. Mahlum, Larry A. Taylor | 1996-03-26 |
| 5494526 | Method for cleaning semiconductor wafers using liquified gases | — | 1996-02-27 |
| 5435379 | Method and apparatus for low-temperature semiconductor processing | Mehrdad M. Moslehi, Habib N. Najm, Cecil J. Davis | 1995-07-25 |
| 5436528 | Plasma source employing spiral RF coil and method for using same | — | 1995-07-25 |
| 5434107 | Method for planarization | — | 1995-07-18 |
| 5430355 | RF induction plasma source for plasma processing | — | 1995-07-04 |
| 5389153 | Plasma processing system using surface wave plasma generating apparatus and method | Steve S. Huang | 1995-02-14 |
| 5249865 | Interferometric temperature measurement system and method | Steven A. Henck, Walter M. Duncan | 1993-10-05 |
| 5231334 | Plasma source and method of manufacturing | — | 1993-07-27 |