Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8737717 | Method and apparatus for defect identification | Mei-Chun Lin, Ching-Fang Yu, Sheng-Chi Chin | 2014-05-27 |
| 8691476 | EUV mask and method for forming the same | Ching-Fang Yu, Sheng-Chi Chin | 2014-04-08 |
| 8656318 | System and method for combined intraoverlay metrology and defect inspection | Hsin-Chang Lee, Chia-Jen Chen, Yeh Lee-Chih, Sheng-Chi Chin, Anthony Yen | 2014-02-18 |
| 8598042 | Device manufacturing and cleaning method | Chi-Lun Lu, Kuan-Wen Lin, Ching-Wei Shen, Sheng-Chi Chin | 2013-12-03 |