Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6585826 | Semiconductor wafer cleaning method to remove residual contamination including metal nitride particles | Yali Tai, Wen-Long Lee, Francis Wang, Szu-An Wu, Hsi-Kuei Cheng +1 more | 2003-07-01 |
| 6573189 | Manufacture method of metal bottom ARC | Ming-Hua Yu, Szu-An Wu | 2003-06-03 |
| 6518200 | Graded composite layer and method for fabrication thereof | — | 2003-02-11 |
| 6472719 | Method of manufacturing air gap in multilevel interconnection | Yen-Ming Chen, Juin-Jie Chang, Kuei-Wu Huang | 2002-10-29 |
| 6436791 | Method of manufacturing a very deep STI (shallow trench isolation) | Szu-An Wu, Ying-Lang Wang, Guey Bao Huang | 2002-08-20 |
| 6429538 | Method for making a novel graded silicon nitride/silicon oxide (SNO) hard mask for improved deep sub-micrometer semiconductor processing | — | 2002-08-06 |
| 6372645 | Methods to reduce metal bridges and line shorts in integrated circuits | Chung-Shi Liu, Shau-Lin Shue, Chen-Hua Yu, Ming-Jer Lee, Ying-Lang Wang +1 more | 2002-04-16 |
| 6287962 | Method for making a novel graded silicon nitride/silicon oxide (SNO) hard mask for improved deep sub-micrometer semiconductor processing | — | 2001-09-11 |
| 6268267 | Silicon-oxynitride-oxide (SXO) continuity film pad to recessed bird's beak of LOCOS | — | 2001-07-31 |
| 6218314 | Silicon dioxide-oxynitride continuity film as a passivation film | — | 2001-04-17 |
| 6211057 | Method for manufacturing arch air gap in multilevel interconnection | Yen-Ming Chen | 2001-04-03 |
| 6171978 | Method of manufacturing capacitor dielectric | Fu-Jier Fahn, Jenq-Dong Sheu | 2001-01-09 |
| 6130151 | Method of manufacturing air gap in multilevel interconnection | Yen-Ming Chen, Juin-Jie Chang, Kuei-Wu Huang | 2000-10-10 |
| 6094275 | Apparatus and method for measuring optical properties of a coating layer | — | 2000-07-25 |
| 6077733 | Method of manufacturing self-aligned T-shaped gate through dual damascene | Yen-Ming Chen, Wei-Jen Liu, Kuo-Chou Liu | 2000-06-20 |
| 6069063 | Method to form polysilicon resistors shielded from hydrogen intrusion | Juin-Jie Chang, Yen-Ming Chen, Yung-Lung Hsu | 2000-05-30 |
| 5950094 | Method for fabricating fully dielectric isolated silicon (FDIS) | Hui Yu, Yen-Ming Chen, Hui-Hua Chang | 1999-09-07 |