Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6740196 | RTA chamber with in situ reflective index monitor | Fu-Su Lee, Ching-Shan Lu | 2004-05-25 |
| 6589356 | Method for cleaning a silicon-based substrate without NH4OH vapor damage | Jih-Churng Twu, Rong-Hui Kao | 2003-07-08 |
| 6472719 | Method of manufacturing air gap in multilevel interconnection | Shih-Chi Lin, Yen-Ming Chen, Kuei-Wu Huang | 2002-10-29 |
| 6130151 | Method of manufacturing air gap in multilevel interconnection | Shih-Chi Lin, Yen-Ming Chen, Kuei-Wu Huang | 2000-10-10 |
| 6069063 | Method to form polysilicon resistors shielded from hydrogen intrusion | Shih-Chi Lin, Yen-Ming Chen, Yung-Lung Hsu | 2000-05-30 |