Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7089677 | Method for calibrating alignment mark positions on substrates | Ching-Shan Lu, Chien-Yao Kao | 2006-08-15 |
| 6777251 | Metrology for monitoring a rapid thermal annealing process | Ching-Shan Lu, Wei-Ming You, Jih-Churng Twu, Yu-Chien Hsiao | 2004-08-17 |
| 6740196 | RTA chamber with in situ reflective index monitor | Juin-Jie Chang, Ching-Shan Lu | 2004-05-25 |