Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7220650 | Sidewall spacer for semiconductor device and fabrication method thereof | Chang-Sheng Tsao, Yen-Ming Chen, Lin-June Wu | 2007-05-22 |
| 6589356 | Method for cleaning a silicon-based substrate without NH4OH vapor damage | Juin-Jie Chang, Jih-Churng Twu | 2003-07-08 |
| 6503333 | Method for cleaning semiconductor wafers with ozone-containing solvent | Jih-Churng Twu, Chia-Chun Cheng | 2003-01-07 |
| 6425191 | Apparatus and method for reducing solvent residue in a solvent-type dryer for semiconductor wafers | Ming-Dar Guo, Jih-Churng Twu, Tsung-Chieh Tsai, Chia-Chun Cheng | 2002-07-30 |