CT

Chia-Shiung Tsai

TSMC: 496 patents #8 of 12,232Top 1%
📍 Jinshanmian, TW: #1 of 466 inventorsTop 1%
Overall (All Time): #387 of 4,157,543Top 1%
498
Patents All Time

Issued Patents All Time

Showing 476–498 of 498 patents

Patent #TitleCo-InventorsDate
5962346 Fluorine-doped silicate glass hard mask to improve metal line etching profile Shau-Lin Shue 1999-10-05
5930644 Method of forming a shallow trench isolation using oxide slope etching Kuei-Ying Lee, Hun-Jan Tao 1999-07-27
5925575 Dry etching endpoint procedure to protect against photolithographic misalignments Hun-Jan Tao 1999-07-20
5922516 Bi-layer silylation process Chen-Hua Yu 1999-07-13
5904566 Reactive ion etch method for forming vias through nitrogenated silicon oxide layers Hun-Jan Tao 1999-05-18
5899748 Method for anchoring via/contact in semiconductor devices and devices formed Hun-Jan Tao 1999-05-04
5880005 Method for forming a tapered profile insulator shape Hun-Jan Tao 1999-03-09
5872061 Plasma etch method for forming residue free fluorine containing plasma etched layers Shing-Long Lee, So Wein Kuo 1999-02-16
5871658 Optical emisson spectroscopy (OES) method for monitoring and controlling plasma etch process when forming patterned layers Hun-Jan Tao, Chen-Hua Yu 1999-02-16
5866481 Selective partial curing of spin-on-glass by ultraviolet radiation to protect integrated circuit dice near the wafer edge Pin-Nan Tseng, Sung-Mu Hsu 1999-02-02
5858838 Method for increasing DRAM capacitance via use of a roughened surface bottom capacitor plate Chen-Jong Wang 1999-01-12
5858621 Bi-layer silylation process using anti-reflective-coatings (ARC) for making distortion-free submicrometer photoresist patterns Chen-Hua Yu 1999-01-12
5856227 Method of fabricating a narrow polycide gate structure on an ultra-thin gate insulator layer Chen-Hua Yu 1999-01-05
5837599 Wafer surface modification for improved electrostatic chucking efficiency Hun-Jan Tao 1998-11-17
5833817 Method for improving conformity and contact bottom coverage of sputtered titanium nitride barrier layers Ying Wang, Chen-Hua Yu 1998-11-10
5753418 0.3 Micron aperture width patterning process Yuan-Chang Huang, Chen-Hua Yu 1998-05-19
5728619 Selective reactive Ion etch (RIE) method for forming a narrow line-width high aspect ratio via through an integrated circuit layer Chen-Hua Yu 1998-03-17
5688719 Method for plasma hardening of patterned photoresist layers Sung-Mu Hsu 1997-11-18
5674775 Isolation trench with a rounded top edge using an etch buffer layer Chin-Hsiung Ho, Cheng-Kai Liu, Chaochieh Tsai 1997-10-07
5670426 Method for reducing contact resistance So-Wen Kuo 1997-09-23
5620817 Fabrication of self-aligned attenuated rim phase shift mask Jung-Hsien Hsu, Chung-Kuang Lee 1997-04-15
5575706 Chemical/mechanical planarization (CMP) apparatus and polish method Pin-Nan Tseng 1996-11-19
5486266 Method for improving the adhesion of a deposited metal layer Tien-Chen Chang 1996-01-23