Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460957 | Method and structure for nitrogen-doped shallow-trench isolation dielectric | Yi-Chieh Wang, Chung-Han Lin, Kuang-Jung Peng, Yun-Min Chang, Shou-Wen Kuo | 2016-10-04 |
| 7511936 | Method and apparatus for dynamic plasma treatment of bipolar ESC system | Cuker Huang, Yi Lu, Chia-Ling Lee | 2009-03-31 |
| 6926590 | Method of improving device performance | Kuo-Hui Chang, Ching Lang Yen | 2005-08-09 |
| 6245666 | Method for forming a delamination resistant multi-layer dielectric layer for passivating a conductor layer | May-Ho Ko | 2001-06-12 |
| 5943582 | Method for forming DRAM stacked capacitor | Julie Huang | 1999-08-24 |
| 5877092 | Method for edge profile and design rules control | Julie Huang | 1999-03-02 |
| 5872061 | Plasma etch method for forming residue free fluorine containing plasma etched layers | Chia-Shiung Tsai, So Wein Kuo | 1999-02-16 |
| 5783482 | Method to prevent oxide peeling induced by sog etchback on the wafer edge | Yeong-Rong Chang, Weng-Liang Fang, Cheng-Hao Huang | 1998-07-21 |