Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378954 | Plasma pre-treatment for improved uniformity in semiconductor manufacturing | Yihguei Wey | 2016-06-28 |
| 7511936 | Method and apparatus for dynamic plasma treatment of bipolar ESC system | Shing-Long Lee, Yi Lu, Chia-Ling Lee | 2009-03-31 |
| 7253114 | Self-aligned method for defining a semiconductor gate oxide in high voltage device area | Chien-Mao Chen, Jun Liu, Chi-Hsuen Chang | 2007-08-07 |