Issued Patents All Time
Showing 76–100 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8283987 | Resonator electrode shields | David Raymond Pedersen, Thor Juneau | 2012-10-09 |
| 8222974 | MEMS resonator structure including regions with different densities and method | Markus Lutz, Zhiyu Pan | 2012-07-17 |
| 8018077 | Electromechanical system having a controlled atmosphere, and method of fabricating same | Markus Lutz, Silvia Kronmueller | 2011-09-13 |
| 7923278 | Integrated getter area for wafer level encapsulated microelectromechanical systems | Markus Lutz | 2011-04-12 |
| 7907035 | MEMS resonator array structure and method of operating and using same | Markus Lutz, Zhiyu Pan | 2011-03-15 |
| 7907027 | Frequency and/or phase compensated microelectromechanical oscillator | Markus Lutz | 2011-03-15 |
| 7859067 | Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed and methods for fabricating same | Markus Lutz, Silvia Kronmueller | 2010-12-28 |
| 7824943 | Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same | Markus Lutz, Brian Stark | 2010-11-02 |
| 7808332 | Resonator electrode shields | David Raymond Pedersen, Thor Juneau | 2010-10-05 |
| 7777596 | MEMS resonator structure and method | Markus Lutz, Zhiyu Pan | 2010-08-17 |
| 7767482 | Microelectromechanical systems having stored charge and methods for fabricating and using same | Brian Stark, Markus Lutz | 2010-08-03 |
| 7750758 | Multi-ring resonator system and method | Pan Zhiyu, Robert N. Candler, Markus Lutz, Gary Yama | 2010-07-06 |
| 7629657 | Episeal pressure sensor | Markus Lutz | 2009-12-08 |
| 7625773 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Wilhelm Frey, Markus Ulm, Matthias Metz, Brian Stark +1 more | 2009-12-01 |
| 7625603 | Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics | Markus Lutz, Silvia Kronmueller | 2009-12-01 |
| 7595708 | MEMS resonator array structure | Markus Lutz, Zhiyu Pan | 2009-09-29 |
| 7595539 | Method for release of surface micromachined structures in an epitaxial reactor | Markus Lutz | 2009-09-29 |
| 7579206 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Markus Lutz, Silvia Kronmueller | 2009-08-25 |
| 7532081 | Frequency and/or phase compensated microelectromechanical oscillator | Markus Lutz | 2009-05-12 |
| 7514283 | Method of fabricating electromechanical device having a controlled atmosphere | Markus Lutz, Silvia Kronmueller | 2009-04-07 |
| 7507669 | Gap tuning for surface micromachined structures in an epitaxial reactor | Markus Lutz | 2009-03-24 |
| 7456042 | Microelectromechanical systems having stored charge and methods for fabricating and using same | Brian Stark, Markus Lutz | 2008-11-25 |
| 7453324 | Frequency and/or phase compensated microelectromechanical oscillator | Markus Lutz | 2008-11-18 |
| 7449355 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Markus Lutz, Wilhelm Frey, Markus Ulm, Matthias Metz, Brian Stark +1 more | 2008-11-11 |
| 7446619 | Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same | Bernhard Boser, Crist Y. Lu, Markus Lutz | 2008-11-04 |