Issued Patents All Time
Showing 101–125 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7446620 | Microelectromechanical oscillator having temperature measurement system, and method of operating same | Bernhard Boser, Crist Y. Lu, Markus Lutz | 2008-11-04 |
| 7427905 | Temperature controlled MEMS resonator and method for controlling resonator frequency | Markus Lutz | 2008-09-23 |
| 7403084 | Microelectromechanical resonator structure, and method of designing, operating and using same | Markus Lutz | 2008-07-22 |
| 7369004 | Microelectromechanical oscillator and method of operating same | Bernhard Boser, Crist Y. Lu, Markus Lutz, Paul M. Hagelin | 2008-05-06 |
| 7362197 | Temperature compensation for silicon MEMS resonator | Markus Lutz | 2008-04-22 |
| 7352040 | Microelectromechanical systems having trench isolated contacts, and methods for fabricating same | Markus Lutz, Silvia Kronmueller | 2008-04-01 |
| 7323952 | Breath-mode ring resonator structure, and method of designing, operating and using same | Zhiyu Pan, Markus Lutz | 2008-01-29 |
| 7319372 | In-plane mechanically coupled microelectromechanical tuning fork resonators | Zhiyu Pan, Rob Norris Candler, Markus Lutz, Volker Materna, Gary Yama +1 more | 2008-01-15 |
| 7317233 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Markus Lutz, Silvia Kronmueller | 2008-01-08 |
| 7288824 | Microelectromechanical systems, and devices having thin film encapsulated mechanical structures | Markus Lutz, Silvia Kronmueller | 2007-10-30 |
| 7268646 | Temperature controlled MEMS resonator and method for controlling resonator frequency | Markus Lutz | 2007-09-11 |
| 7227432 | MEMS resonator array structure and method of operating and using same | Markus Lutz, Zhiyu Pan | 2007-06-05 |
| 7224236 | Frequency and/or phase compensated microelectromechanical oscillator | Markus Lutz | 2007-05-29 |
| 7221033 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Markus Lutz | 2007-05-22 |
| 7221230 | Frequency and/or phase compensated microelectromechanical oscillator | Markus Lutz | 2007-05-22 |
| 7221241 | Method for adjusting the frequency of a MEMS resonator | Markus Lutz | 2007-05-22 |
| 7205867 | Microelectromechanical resonator structure, and method of designing, operating and using same | Markus Lutz | 2007-04-17 |
| 7202761 | Temperature compensation for silicon MEMS resonator | Markus Lutz | 2007-04-10 |
| 7172917 | Method of making a nanogap for variable capacitive elements, and device having a nanogap | Markus Lutz, Thomas Kenny | 2007-02-06 |
| 7115436 | Integrated getter area for wafer level encapsulated microelectromechanical systems | Markus Lutz | 2006-10-03 |
| 7102467 | Method for adjusting the frequency of a MEMS resonator | Markus Lutz | 2006-09-05 |
| 7074637 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Markus Lutz | 2006-07-11 |
| 7075160 | Microelectromechanical systems and devices having thin film encapsulated mechanical structures | Markus Lutz, Silvia Kronmueller | 2006-07-11 |
| 7071793 | Temperature compensation for silicon MEMS resonator | Markus Lutz | 2006-07-04 |
| 7068125 | Temperature controlled MEMS resonator and method for controlling resonator frequency | Markus Lutz | 2006-06-27 |