Issued Patents All Time
Showing 126–135 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6995622 | Frequency and/or phase compensated microelectromechanical oscillator | Markus Lutz | 2006-02-07 |
| 6987432 | Temperature compensation for silicon MEMS resonator | Markus Lutz | 2006-01-17 |
| 6952041 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Markus Lutz, Silvia Kronmueller | 2005-10-04 |
| 6939809 | Method for release of surface micromachined structures in an epitaxial reactor | Markus Lutz | 2005-09-06 |
| 6936491 | Method of fabricating microelectromechanical systems and devices having trench isolated contacts | Markus Lutz, Silvia Kronmueller | 2005-08-30 |
| 6930367 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Markus Lutz | 2005-08-16 |
| 6928879 | Episeal pressure sensor and method for making an episeal pressure sensor | Markus Lutz | 2005-08-16 |
| 6808953 | Gap tuning for surface micromachined structures in an epitaxial reactor | Markus Lutz | 2004-10-26 |
| 6725136 | Tire pressure and parameter monitoring system and method using accelerometers | Markus Lutz, Jean-Pierre Hathout, Aleksandar Kojic, Jasim Ahmed | 2004-04-20 |
| 6389899 | In-plane micromachined accelerometer and bridge circuit having same | Alissa M. Fitzgerald, Benjamin W. Chui, Jospeh Kurth Reynolds, Thomas Kenny | 2002-05-21 |