Issued Patents All Time
Showing 26–50 of 135 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11323071 | Low Allan-Deviation oscillator | Sassan Tabatabaei, Lijun Chen, Kamran Souri | 2022-05-03 |
| 11312622 | MEMS with over-voltage protection | Nicholas Miller, Ginel C. Hill, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin | 2022-04-26 |
| 11218984 | Fixed-beacon time transfer system | Markus Lutz, Sassan Tabatabaei, Charles I. Grosjean, Paul M. Hagelin | 2022-01-04 |
| 11146228 | Frequency compensated oscillator design for process tolerances | Markus Lutz | 2021-10-12 |
| 11012049 | Resonator electrode shields | David Raymond Pedersen, Thor Juneau | 2021-05-18 |
| 11005422 | Low allan-deviation oscillator | Sassan Tabatabaei, Lijun Chen, Kamran Souri | 2021-05-11 |
| 10913655 | Manufacturing of integrated circuit resonator | Pavan Gupta, Markus Lutz | 2021-02-09 |
| 10800650 | MEMS with small-molecule barricade | Charles I. Grosjean, Paul M. Hagelin, Michael Julian Daneman, Ginel C. Hill | 2020-10-13 |
| 10766768 | Encapsulated microelectromechanical structure | Markus Lutz, Pavan Gupta | 2020-09-08 |
| 10737934 | MEMS with over-voltage protection | Nicholas Miller, Ginel C. Hill, Charles I. Grosjean, Michael Julian Daneman, Paul M. Hagelin | 2020-08-11 |
| 10723617 | Package structure for micromechanical resonator | Pavan Gupta, Markus Lutz | 2020-07-28 |
| 10622973 | Temperature sensor based on ratio of clock signals from respective MEMS resonators | Samira Zaliasl, Meisam Heidarpour Roshan, Sassan Tabatabaei | 2020-04-14 |
| 10622945 | Low Allan-Deviation oscillator | Sassan Tabatabaei, Lijun Chen, Kamran Souri | 2020-04-14 |
| 10476477 | Dual-resonator semiconductor die | Charles I. Grosjean, Ginel C. Hill, Paul M. Hagelin, Renata Melamud Berger, Markus Lutz | 2019-11-12 |
| 10458858 | Micromachined thermistor | Carl Arft, Paul M. Hagelin | 2019-10-29 |
| 10450190 | Encapsulated microelectromechanical structure | Markus Lutz, Pavan Gupta | 2019-10-22 |
| 10439579 | Frequency compensated oscillator design for process tolerances | Markus Lutz | 2019-10-08 |
| 10439590 | Resonator electrode shields | David Raymond Pedersen, Thor Juneau | 2019-10-08 |
| 10287162 | Low-profile stacked-die MEMS resonator system | Pavan Gupta, Markus Lutz | 2019-05-14 |
| 10247621 | High resolution temperature sensor | Samira Zaliasl, Meisam Heidarpour Roshan, Sassan Tabatabaei | 2019-04-02 |
| 10099917 | Encapsulated microelectromechanical structure | Markus Lutz, Pavan Gupta | 2018-10-16 |
| 10003320 | Resonator electrode shields | David Raymond Pedersen, Thor Juneau | 2018-06-19 |
| 9985598 | Frequency compensated oscillator design for process tolerances | Markus Lutz | 2018-05-29 |
| 9945734 | Micromachined thermistor | Carl Arft, Paul M. Hagelin | 2018-04-17 |
| 9821998 | Stacked-die MEMS resonator system | Pavan Gupta, Markus Lutz | 2017-11-21 |