Issued Patents All Time
Showing 526–550 of 563 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461789 | Polymers, chemical amplification resist compositions and patterning process | Jun Watanabe, Yuji Harada | 2002-10-08 |
| 6461790 | Polymers, chemical amplification resist compositions and patterning process | Jun Watanabe, Yuji Harada, Mutsuo Nakashima, Masaru Sasago, Shinji Kishimura | 2002-10-08 |
| 6455223 | Resist compositions and patterning process | Tomohiro Kobayashi, Osamu Watanabe, Takanobu Takeda, Toshinobu Ishihara, Jun Watanabe | 2002-09-24 |
| 6448420 | Acid-decomposable ester compound suitable for use in resist material | Takeshi Kinsho, Tsunehiro Nishi, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima | 2002-09-10 |
| 6444396 | Ester compounds, polymers, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Tsunehiro Nishi, Mutsuo Nakashima, Koji Hasegawa | 2002-09-03 |
| 6436606 | Polymers, resist compositions and patterning process | Jun Watanabe, Yuji Harada | 2002-08-20 |
| 6420085 | Resist compositions and patterning process | Tsunehiro Nishi, Youichi Ohsawa | 2002-07-16 |
| 6413695 | Resist compositions and patterning process | Tsunehiro Nishi, Takeshi Kinsho, Takeru Watanabe, Koji Hasegawa, Mutsuo Nakashima | 2002-07-02 |
| 6414101 | Dendritic polymers and making method | Osamu Watanabe, Takanobu Takeda, Tomohiro Kobayashi, Toshinobu Ishihara, Jun Watanabe | 2002-07-02 |
| 6403822 | Ester compounds having alicyclic structure and method for preparing same | Takeru Watanabe, Koji Hasegawa, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-06-11 |
| 6403823 | Ester compounds having alicyclic structure and method for preparing same | Koji Hasegawa, Takeru Watanabe, Takeshi Kinsho, Mutsuo Nakashima, Seiichiro Tachibana +1 more | 2002-06-11 |
| 6399274 | Resist composition and patterning process | Takeshi Kinsho, Tsunehiro Nishi, Koji Hasegawa, Takeru Watanabe | 2002-06-04 |
| 6369279 | Styrene derivatives | Mutsuo Nakashima, Jun Watanabe, Yuji Harada | 2002-04-09 |
| 6333436 | Styrene derivatives | Matsuo Nakashima, Jun Watanabe, Yuji Harada | 2001-12-25 |
| 6312867 | Ester compounds, polymers, resist compositions and patterning process | Takeshi Kinsho, Tsunehiro Nishi, Hideshi Kurihara, Koji Hasegawa, Takeru Watanabe +3 more | 2001-11-06 |
| 6309796 | High molecular weight silicone compounds resist compositions, and patterning method | Mutsuo Nakashima, Ichiro Kaneko, Toshinobu Ishihara, Junji Tsuchiya, Shigehiro Nagura | 2001-10-30 |
| 6280898 | Lactone-containing compounds, polymers, resist compositions, and patterning method | Koji Hasegawa, Tsunehiro Nishi, Takeshi Kinsho, Osamu Watanabe | 2001-08-28 |
| 6274286 | Resist compositions | Tsunehiro Nishi, Takeshi Nagata, Shigehiro Nagura | 2001-08-14 |
| 6156481 | Positive resist composition | Takanobu Takeda, Osamu Watanabe, Jun Watanabe, Youichi Ohsawa, Toshinobu Ishihara | 2000-12-05 |
| 6147249 | Ester compounds, polymers, resist composition and patterning process | Takeru Watanabe, Takeshi Kinsho, Tsunehiro Nishi, Mutsuo Nakashima, Koji Hasegawa | 2000-11-14 |
| 6117621 | Patterning method | Shigehiro Nagura | 2000-09-12 |
| 6048661 | Polymeric compounds, chemically amplified positive type resist materials and process for pattern formation | Tsunehiro Nishi, Shigehiro Nagura, Toshinobu Ishihara | 2000-04-11 |
| 6030746 | Di- and triphenyl monoterpene hydrocarbon derivatives, dissolution inhibitors, and chemically amplified positive resist compositions | Takeshi Nagata, Satoshi Watanabe, Tsunehiro Nishi, Shigehiro Nagura, Toshinobu Ishihara | 2000-02-29 |
| 5985512 | Chemically amplified positive resist compositions | Shigehiro Nagura, Toshinobu Ishihara | 1999-11-16 |
| 5972560 | High molecular weight silicone compound, chemically amplified positive resist composition and patterning method | Ichiro Kaneko, Mutsuo Nakashima, Toshinobu Ishihara, Junji Tsuchiya, Shigehiro Nagura | 1999-10-26 |