Issued Patents All Time
Showing 51–75 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6701941 | Method for treating the surface of a workpiece | Mignon P. Hess | 2004-03-09 |
| 6691720 | Multi-process system with pivoting process chamber | Dana Scranton, Eric Lund, Gil Lund | 2004-02-17 |
| 6668844 | Systems and methods for processing workpieces | Eric Lund, Joe Lanfrankie, Gil Lund, Dana Scranton | 2003-12-30 |
| 6601594 | Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpiece | Mignon P. Hess | 2003-08-05 |
| 6591845 | Apparatus and method for processing the surface of a workpiece with ozone | Mignon P. Hess | 2003-07-15 |
| 6582525 | Methods for processing a workpiece using steam and ozone | — | 2003-06-24 |
| 6543156 | Method and apparatus for high-pressure wafer processing and drying | Ian Sharp, Craig P. Meuchel, H. Frederick Woods | 2003-04-08 |
| 6497768 | Process for treating a workpiece with hydrofluoric acid and ozone | — | 2002-12-24 |
| 6488038 | Method for cleaning semiconductor substrates | Craig P. Meuchel, Ian Sharp | 2002-12-03 |
| 6427359 | Systems and methods for processing workpieces | Dana Scranton, Eric Lund, Gil Lund | 2002-08-06 |
| 6401732 | Thermocapillary dryer | — | 2002-06-11 |
| 6357142 | Method and apparatus for high-pressure wafer processing and drying | Ian Sharp, Craig P. Meuchel, H. Frederick Woods | 2002-03-19 |
| 6319841 | Semiconductor processing using vapor mixtures | Robert W. Berner, David Oberlitner | 2001-11-20 |
| 6286231 | Method and apparatus for high-pressure wafer processing and drying | Ian Sharp, Craig P. Meuchel, H. Frederick Woods | 2001-09-11 |
| 6273108 | Apparatus and method for processing the surface of a workpiece with ozone | Mignon P. Hess | 2001-08-14 |
| 6267125 | Apparatus and method for processing the surface of a workpiece with ozone | Mignon P. Hess | 2001-07-31 |
| 6240933 | Methods for cleaning semiconductor surfaces | — | 2001-06-05 |
| 6199298 | Vapor assisted rotary drying method and apparatus | — | 2001-03-13 |
| 6192600 | Thermocapillary dryer | — | 2001-02-27 |
| 6162734 | Semiconductor processing using vapor mixtures | Robert W. Berner, David Oberlitner | 2000-12-19 |
| 6022484 | Semiconductor processor with wafer face protection | Martin Bleck, Timothy J. Reardon | 2000-02-08 |
| 5954911 | Semiconductor processing using vapor mixtures | Robert W. Berner, David Oberlitner | 1999-09-21 |
| 5762751 | Semiconductor processor with wafer face protection | Martin Bleck, Timothy J. Reardon | 1998-06-09 |
| 5584310 | Semiconductor processing with non-jetting fluid stream discharge array | Thomas H. Oberlitner | 1996-12-17 |
| 5500081 | Dynamic semiconductor wafer processing using homogeneous chemical vapors | — | 1996-03-19 |