Issued Patents All Time
Showing 76–83 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5489341 | Semiconductor processing with non-jetting fluid stream discharge array | Thomas H. Oberlitner | 1996-02-06 |
| 5377708 | Multi-station semiconductor processor with volatilization | Timothy J. Reardon, Raymon F. Thompson, Aleksander Owczarz | 1995-01-03 |
| 5370741 | Dynamic semiconductor wafer processing using homogeneous chemical vapors | — | 1994-12-06 |
| 5357991 | Gas phase semiconductor processor with liquid phase mixing | Timothy J. Reardon, Raymon F. Thompson, Aleksander Owczarz | 1994-10-25 |
| 5332445 | Aqueous hydrofluoric acid vapor processing of semiconductor wafers | — | 1994-07-26 |
| 5238500 | Aqueous hydrofluoric and hydrochloric acid vapor processing of semiconductor wafers | — | 1993-08-24 |
| 5235995 | Semiconductor processor apparatus with dynamic wafer vapor treatment and particulate volatilization | Timothy J. Reardon, Raymon F. Thompson, Aleksander Owczarz | 1993-08-17 |
| 5232511 | Dynamic semiconductor wafer processing using homogeneous mixed acid vapors | — | 1993-08-03 |