Issued Patents All Time
Showing 51–75 of 122 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6642157 | Film forming method and semiconductor device | Yoshimi Shioya, Yuichiro Kotake, Youichi Yamamoto, Tomomi Suzuki, Hiroshi Ikakura +2 more | 2003-11-04 |
| 6630412 | Semiconductor device and method of manufacturing the same | Yoshimi Shioya, Kouichi Ohira, Tomomi Suzuki, Hiroshi Ikakura, Youichi Yamamoto | 2003-10-07 |
| 6548426 | Method for improving a quality of dielectric layer and semiconductor device | Setsu Suzuki | 2003-04-15 |
| 6524972 | Method for forming an interlayer insulating film, and semiconductor device | — | 2003-02-25 |
| 6514884 | Method for reforming base surface, method for manufacturing semiconductor device and equipment for manufacturing the same | — | 2003-02-04 |
| 6514855 | Semiconductor device manufacturing method having a porous insulating film | Tomomi Suzuki, Hiroshi Ikakura, Yoshimi Shioya, Koichi Ohira | 2003-02-04 |
| 6504154 | Non-destructive sugar content measuring apparatus | Junji Iida, Akira Terashima, Shintaro Ishikawa, Shinji Yamauchi | 2003-01-07 |
| 6500752 | Semiconductor device and semiconductor device manufacturing method | Taizo Oku, Junichi Aoki, Youichi Yamamoto, Takashi Koromokawa | 2002-12-31 |
| 6479409 | Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent | Yoshimi Shioya, Kouichi Ohira, Tomomi Suzuki, Hiroshi Ikakura, Youichi Yamamoto +3 more | 2002-11-12 |
| 6479408 | Semiconductor device and method of manufacturing the same | Yoshimi Shioya, Kouichi Ohira | 2002-11-12 |
| 6472334 | Film forming method, semiconductor device manufacturing method, and semiconductor device | Hiroshi Ikakura, Tomomi Suzuki, Yoshimi Shioya, Kouichi Ohira | 2002-10-29 |
| 6472818 | Light bulb | Taku Ikeda | 2002-10-29 |
| 6435196 | Impurity processing apparatus and method for cleaning impurity processing apparatus | Noritada Satoh, Kouichi Ohira, Bunya Matsui | 2002-08-20 |
| 6432839 | Film forming method and manufacturing method of semiconductor device | Noboru Tokumasu, Yuki Ishii, Toshiro Nishiyama | 2002-08-13 |
| 6420276 | Semiconductor device and semiconductor device manufacturing method | Taizo Oku, Junichi Aoki, Youichi Yamamoto, Takashi Koromokawa | 2002-07-16 |
| 6413879 | Method for forming an interlayer insulating film, and semiconductor device | — | 2002-07-02 |
| 6403410 | Plasma doping system and plasma doping method | Kouichi Ohira, Bunya Matsui | 2002-06-11 |
| 6372670 | Method and apparatus for forming an interlayer insulating film, and semiconductor device | — | 2002-04-16 |
| 6352943 | Method of film formation and method for manufacturing semiconductor device | Yuhko Nishimoto | 2002-03-05 |
| 6336837 | Tungsten halogen lamp and method for manufacturing the same | — | 2002-01-08 |
| 6281113 | Method for forming an interplayer insulating film and semiconductor device | — | 2001-08-28 |
| 6239550 | Tungsten halogen lamp with infrared reflecting film and method for manufacturing the same | — | 2001-05-29 |
| 6221755 | Film formation method and manufacturing method of semiconductor device | Noboru Tokumasu | 2001-04-24 |
| 6133162 | Method of forming a film by using plasmanized process gas containing gaseous H.sub.2 O and an auxiliary gas in a semiconductor device | Setsu Suzuki, Junichi Aoki | 2000-10-17 |
| 6110814 | Film forming method and semiconductor device manufacturing method | Noboru Tokumasu | 2000-08-29 |