| 6835669 |
Film forming method, semiconductor device and semiconductor device manufacturing method |
Junichi Aoki, Youichi Yamamoto, Takashi Koromokawa, Kazuo Maeda |
2004-12-28 |
| 6646327 |
Semiconductor device and semiconductor device manufacturing method |
Junichi Aoki, Youichi Yamamoto, Takashi Koromokawa |
2003-11-11 |
| 6500752 |
Semiconductor device and semiconductor device manufacturing method |
Junichi Aoki, Youichi Yamamoto, Takashi Koromokawa, Kazuo Maeda |
2002-12-31 |
| 6472330 |
Method for forming an interlayer insulating film, and semiconductor device |
Toshio Kato, Noboru Tokumasu, Makoto Kurotobi |
2002-10-29 |
| 6420276 |
Semiconductor device and semiconductor device manufacturing method |
Junichi Aoki, Youichi Yamamoto, Takashi Koromokawa, Kazuo Maeda |
2002-07-16 |