Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435196 | Impurity processing apparatus and method for cleaning impurity processing apparatus | Kouichi Ohira, Bunya Matsui, Kazuo Maeda | 2002-08-20 |
| 6207537 | Method for formation of impurity region in semiconductor layer and apparatus for introducing impurity to semiconductor layer | Bunya Matsui | 2001-03-27 |