Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435196 | Impurity processing apparatus and method for cleaning impurity processing apparatus | Noritada Satoh, Kouichi Ohira, Kazuo Maeda | 2002-08-20 |
| 6403410 | Plasma doping system and plasma doping method | Kouichi Ohira, Kazuo Maeda | 2002-06-11 |
| 6207537 | Method for formation of impurity region in semiconductor layer and apparatus for introducing impurity to semiconductor layer | Noritada Satoh | 2001-03-27 |
| 5286681 | Method for manufacturing semiconductor device having a self-planarizing film | Kazuo Maeda, Yuko Nishimoto | 1994-02-15 |